摘要
根据杠杆原理,使用结构紧凑的柔性导向支承机构,将压电驱动元件的伸长量传递到精密机床的进给系统上,进行精密进给。调节输入输出比可改变输出量大小及系统刚度。简述设计过程,提出了铰链的解析模型和有限元模型。测试结果表明柔性导向支承机构的静态刚度为5.5 N/μm,自振频率为439 Hz;微进给工作台行程为25μm,静态刚度约为200 N/μm。
Micro-position system and rough-position system are often used in precision machines simultaneously. According to leverage, a compact flexure hinge is designed to translate the deformation of the piezoelectric ceramics to achieve precision feed. Through changing the ratio of the output and input, the static stiffness and the stroke of the platform can be changed. The process of designing the micro-position platform is described. And the analysis model and finite element model of the platform are put forward. The static stiffness of the flexure is 5.5 N/μm. The micro-position platform has a stroke of 25 μm and a static stiffness of 200 N/μm.
出处
《压电与声光》
CSCD
北大核心
2007年第2期240-242,共3页
Piezoelectrics & Acoustooptics
基金
上海市科技攻关基金资助项目(041111007)
