摘要
重点介绍了一种基于PZT驱动的双柔性平行四连杆结构二维微动工作台。推导了柔性铰链各尺寸对固有频率的影响公式,并用有限元参数化分析方法,找到对固有频率影响较大的参数。将有限元模态分析值和实验测试结果相比较,探讨影响微动工作台动态性能的综合因素,为微动台的设计提供理论和实验依据。
A novel 2-D micro-positioner drived by PZT was introduced, which is based on the double flexible hinges in a structure of parallel four-linkage. The expression about the influence of dimension on the natural frequency of the worktable was deduced, and the parameters that effect the natural frequency greatly were found out by using FEA. The simulated results were compared with the corresponding experimental ones in order to analyze the factors influencing the dynamic properties, and it provides a theoretical and experimental basis for the design of micro-positioner.
出处
《机床与液压》
北大核心
2007年第4期50-52,共3页
Machine Tool & Hydraulics
