微细光成型固化工艺参数优化

Optimization of solidification process parameters in micro stereo lithography

为了分析紫外光对液态光敏树脂进行曝光固化成型过程中工艺参数对固化物的形状和精度的影响,根据自行研制的实验系统的大量数据,对线形固化中的主要工艺参数进行了分析和优化。结果表明,在单层液态树脂膜厚30μm,曝光光束功率0.15μW,扫描速度15μm/s以及工作距650μm时能够得到具有较高精度线宽和线高的固化直线段,利用优化的工艺参数,成功实现了三维微小实体结构的成型制造。

For analysis on the effect of process parameters on the shape and precision of solidification in photosensitive resin solidification with UV light exposing, the main solidification process parameters are analyzed and optimized based on the experiment data got by self-made equipment. The high precision solidified line is abtained in the thickness of a single layer of liquid resin of 30 μm, the exposing power of 0.15μW, the scanning speed of 15μm/s and the working length between objective lens and surface of resin of 650μm. With the optimized process parameters, 3D micro structures are manufactured successfully.