电沉积Co–Mo合金薄膜的结构和热稳定性

Structure and thermal stability of electrodeposited cobalt–molybdenum alloy thin film

通过电沉积，在铜基体上制备了Co-Mo合金薄膜。讨论了薄膜组成与结构以及非晶合金的晶体结构与热处理温度的关系。测定了薄膜磁性能（饱和磁化强度和矫顽力）随热处理温度变化的关系曲线。结果表明，薄膜中钼含量（质量分数）为6.05％～30.03％时，镀态Co-Mo合金薄膜具有非晶态结构；经连续升温到400℃并热处理1，5h后，Co-Mo非晶态合金发生晶化，且随着薄膜中钼含量的增加，薄膜的晶化温度提高，热稳定性增强；在较高温度（高于500℃）下热处理后，Co-Mo非晶态合金晶化，并析出单一的hcp-Co相；热处理后，Co-Mo合金薄膜的软磁性变差。

Co-Mo alloy thin films were electrodeposited on Cu substrate in a bath containing COCl2, Na2MoO4, （NH4）2C6H5O7 and Na2SO4. The relationships between the composition and structure of film and between amorphous structure and heat treatment temperature were studied. The effect of heat treatment temperature on magnetic properties （saturation magnetization and coercive force） of film was discussed. The structure of as-deposited Co-Mo alloy films containing 6.05% - 30.03% Mo is amorphous and changes obviously with heat treatment with continuous temperature rise to 400℃ for 1.5 h. The crystallization temperature and thermal stability of Co-Mo alloy are increased with increasing Mo content. Single hcp-Co phase is precipitated by heat treatment at temperature 〉500 ℃ The soft magnetic properties of Co-Mo alloy thin film are declined after heat treatment.