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SAW传感器对神经性毒剂及模拟剂的检测进展 被引量:3

Progress in nerve agents and their simulants detection by SAW sensors
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摘要 基于压电效应和化学特异选择性的有机敏感材料的声表面波(SAW)传感器,因其具有体积小、响应时间快、选择性好、可集成度高等优点而成为对气体实时、在线检测的重要手段之一。介绍了SAW传感器在神经性毒剂及其模拟剂检测中的应用,重点从SAW传感器测试电路、敏感膜材料、成膜方法及信号处理等方面介绍此领域的研究现状,并对发展趋势进行了展望。 Polymer-coated surface acoustic wave (P-SAW) sensor based on piezoelectric effect and chemical specific selection is one of the most important real-time, on-line gas detection devices with its superiorities such as small size,fast response,good selectivity and high integration. The applications of SAW sensors in deteeting nerve agents and their Simulants are summarized with emphasis on the SAW circuits, sensing materials, film deposition techniques and signal processing algorithm. The development trend of SAW sensors is also discussed.
出处 《传感器与微系统》 CSCD 北大核心 2007年第4期7-10,共4页 Transducer and Microsystem Technologies
关键词 声表面波传感器 敏感膜 质量沉积效应 模式识别 surface acoustic wave (SAW) sensor sensing film mass loading effect pattern recognition
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参考文献38

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