摘要
基于压电效应和化学特异选择性的有机敏感材料的声表面波(SAW)传感器,因其具有体积小、响应时间快、选择性好、可集成度高等优点而成为对气体实时、在线检测的重要手段之一。介绍了SAW传感器在神经性毒剂及其模拟剂检测中的应用,重点从SAW传感器测试电路、敏感膜材料、成膜方法及信号处理等方面介绍此领域的研究现状,并对发展趋势进行了展望。
Polymer-coated surface acoustic wave (P-SAW) sensor based on piezoelectric effect and chemical specific selection is one of the most important real-time, on-line gas detection devices with its superiorities such as small size,fast response,good selectivity and high integration. The applications of SAW sensors in deteeting nerve agents and their Simulants are summarized with emphasis on the SAW circuits, sensing materials, film deposition techniques and signal processing algorithm. The development trend of SAW sensors is also discussed.
出处
《传感器与微系统》
CSCD
北大核心
2007年第4期7-10,共4页
Transducer and Microsystem Technologies
关键词
声表面波传感器
敏感膜
质量沉积效应
模式识别
surface acoustic wave (SAW) sensor
sensing film
mass loading effect
pattern recognition