微机械陀螺仪模态分析

Modal analysis of MEMS gyroscope

利用计算机软件对有限元法构建的微机械陀螺仪模型进行分析可以掌握其各种参数。根据静电梳状驱动结构,设计符合性能指标的陀螺仪结构,并利用有限元分析法借助ANSYS软件对陀螺仪进行模态分析,从而得出陀螺仪的驱动模态和敏感模态,为已经设计的结构提供分析和修正的参考,从而提高微机械陀螺仪设计结构的品质因数。

A series of parameter can be obtained though the modal analysis of MEMS gyroscope by the element finite methol. Based on electrostatic, comb-like driver structure, the structure of MEMS gyroscope is designed according to performance index. The sensing mode and drive mode are analyzed based on finite element method with ANSYS softhard. The reference of analysis and correction for the designed structure is got. The Q-factor of the MEMS gyroscope is also increased.