一体化结构三维加速度传感器的设计

Design of monolithic three-axis acceleration sensor

设计了一种基于单惯性质量块的一体化结构三维加速度传感器。采用一种特殊结构的弹性体元件,实现了三维加速度量都利用剪切应变测量。利用有限元工具对传感器静态和动态特性进行了分析,给出了弹性体的应变分布、固有频率等。有限元分析计算和实验结果表明:所设计的传感器在3个正交方向上都有较高的灵敏度,各加速度分量互相干扰小。其交差灵敏度小于6.5%,非线性误差小于2%,固有频率大于1700Hz。

A monolithic three-axis acceleration sensor based on single inertial mass is designed. Its sensing part is a thin yielding cylinder on which eight holes are opened at two levels, so the shear stress can be gained in three axes. The static and dynamic characteristics of the sensor are analyzed by finite element method. The calculations and experiments prove this sensor is high sensitivity and small cross sensitivity in three axes. Its cross sensitivity is less than 6.5 %. The non-linear error is less than 2 %. The free frequency is more than 1 700 Hz.