摘要
提出了一种激光诱导液相腐蚀新方法——利用腐蚀电流特性和腐蚀图像均匀度相结合的方法,选择出适合的腐蚀溶液。该方法可以提高激光液相腐蚀的性能,解决腐蚀溶液选择的诸多难题,在特殊结构光电器件和光电集成中具有很好的应用前景。
A new method of laser assisted wet etching is proposed, which depends on the etching current characteristic and uniformity of etching image to select the suitable etchant. With the proposed method, the performance of laser assisted wet etching is improved, and many problems existing in the selection of etchant can be solved. The new method shows a bright future in the fabrication of special-structured optoelectronic devices and optoelectronic integration.
出处
《激光与光电子学进展》
CSCD
北大核心
2007年第4期68-71,共4页
Laser & Optoelectronics Progress
基金
国家863项目基金(2002AA306421)
电子科大校青年基金(JX05010)
关键词
激光液相腐蚀
腐蚀溶液
电流特性
腐蚀图像
laser assisted etching
etchant
current characteristic
etching image
