摘要
To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode （LD） interferometers, a novel real-time displacement measurement LD interferometry is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 us.
To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode （LD） interferometers, a novel real-time displacement measurement LD interferometry is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 us.
基金
This work was supported by the National Natural Science Foundation of China (No.60578051)
the Science and Technology Committee of Shanghai (No.051107085 and 06QB14047).
