基于MEMS的一种微机械滤波器的分析

Simulation and Analysis of MEMS-Based Micromechanical Filter

介绍了一种自由梁微机械滤波器的组成及工作原理,采用连续系统的方法来分析该微机械滤波器的谐振器,推导了其弯曲振动模态下的谐振频率公式——Euler-Bernoulli方程。然后根据MEMS材料的特性和微系统表面微加工原理设计了一种共振频率为70 MHz的微机械滤波器工艺,并利用MEMS专业软件Coventor进行仿真分析,仿真结果与计算结果一致,验证了该工艺设计的可行性。

A free-free beam micromechanical filter based on MEMS was described. The method of continuous system was applied to conduct the mechanical vibration frequency through the EulerBernoulli equation. The process of 70 MHz micromechanical filter was designed and simulated by coventorware. The simulation results validate the feasibility of the technology.