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基于小波变换的薄膜激光损伤识别 被引量:8

Recognition of film laser damage based on wavelet transform
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摘要 薄膜激光损伤的准确识别在测量激光损伤阈值的实验中起着至关重要的作用,ISO1125标准规定应采用显微镜观察的方法来识别薄膜损伤。为做到在线自动识别损伤,采用数字图像处理的方法,将小波变换与图像相关识别技术结合在一起,分析了如何利用小波变换来实现薄膜激光损伤识别的理论方法。结果表明,这种识别方法不仅有较高的识别精度,而且可以避免目前损伤测试工作中繁重的人工操作,对实现激光损伤阈值测试装置的自动化有着非常重要的意义。 The correct recognition of film damage plays an important role in the experiment of measuring laser damage threshold. In ISO11254, film damage is recongnized through observation under a microscope. In order to realize on-line and automatic damage recognition, adopting the method of digital image processing, combining wavelet transform with pattern correlation recognition technology, how to carry out film laser damage recognition with wavelet transform is realized. The result illustrates this method not only has highest precision but also avoids heavy labor manipulation and play an important role in automatic damage threshold measurement.
出处 《激光技术》 CAS CSCD 北大核心 2007年第2期131-133,136,共4页 Laser Technology
关键词 薄膜 激光损伤 小波变换 图像相关识别 thin films laser damage wavelet transform pattern correlation recognition
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