超高真空扫描隧道显微镜控制系统的分析研究

Analysis and Study of Ultra high Vacuum Scanning Tunneling Microscope Control System

本文用根轨迹法和尼柯尔斯图法对超高真空扫描隧道显微镜的控制系统进行了分析研究，结果表明，在控制系统中加入积分环节和单极低通滤波环节以后，大大地改善了ＵＨＶ－ＳＴＭ系统的性能，在压电陶瓷的机械共振频率附近。

An analysis and study of an ultra high vacuum scanning tunneling microscope(UHV STM)control system by Root Locus and Nichols approaches is given. The control loop incorporates an integrator and a single pole low pass filter. Analysis and study show that such a compensation scheme provides near optimal behavior of the control loop and deals with mechanical resonance in a particularly satisfactory manner.