热阴极电离真空规测量故障分析和改进

Problem Examinations in Vacuum Measurement with a Hot Filament Ionization Gauge

本文讨论分析了有气体工作的真空室内，使用热阴极电离规测量真空度时，有关的故障问题。

This paper deals with the problems encountered in vacuum measurement with a hot filament ionizaion gauge,and provide some simple ways for testing and solving the problems.