摘要
综述了透明导电薄膜的性能、种类、制备工艺、研究及应用状况,重点讨论了掺铝氧化锌(AZO)薄膜的结构、导电机理、光电性能和当前的研究焦点,指出了需要进一步从材料选择、制备工艺的研究、多层膜光学设计等方面提高透明导电薄膜的综合性能,以满足尖端技术的需要。
The properties , varieties , preparation technology , application , research progress of transparent conductive film are described . The structure , conductive mechanism , photoelectrical performance and current investigation focus of AZO film are emphasized . It is pointed out that the properties of AZO should be improved by making good choice of raw materials , optimizing preparation technology and stacking multi-layer films in order to meet the need of top technology.
出处
《玻璃》
2007年第2期13-15,47,共4页
Glass
关键词
透明导电
薄膜
AZO膜
transparent conductive film , AZO
