摘要
磁光记录介质非晶稀土-过渡金属合金TbFeCo薄膜覆盖Ag保护层可减小稀土元素的氧化且能增强其磁光克尔效应。利用直流磁控溅射法制备出Ag/TbFeCo／Si(100)磁光薄膜,利用可变入射角椭圆偏振光谱仪测量了其可见光区的光学常数,给出薄膜介电函数实部和虚部随入射光子能量的变化规律,同时把Ag／Si、Ag／TbFeCo／Si和TbFeCo／Si的光谱进行了比较。实验结果与经典的Drude模型相一致,而且Ag／TbFeCo／Si的光谱更接近Ag。不同厚度Ag/TbFeCo／Si薄膜其光学参数变化趋势相同,且随Ag厚度的增加变化幅度减小。
The magneto-optical recording media noncrystalline rare earth --typemetal ferrous alloy TbFeCo films was used to cover the protective layers Ag. This method can reduce oxidation of rare earth element and enhance its magneto-optical Kerr effect. Ag/TbFeCo/Si（100） magneto-optical films was prepared by DC-magnetron sputtering. The dielectric function of the Ag/ThFeCo/Si was measured by alterable angle Ellipsometry. Besides, the spectrum of Ag/Si Ag/TbFeCo/Si and ThFeCo/Si was compared. The results are consistent with Drude model. And the spectrum of Ag/TbFeCo/Si is much closer to the spectrum of Ag. The variation tendency for the optical parameters of the Ag/TbFeCo/Si films with different thickness is alike and the ranges of it decrease with the increase of the Ag thickness.
出处
《西南科技大学学报》
CAS
2007年第1期12-15,共4页
Journal of Southwest University of Science and Technology
基金
贵州省科技厅自然科学基金(20033059)
贵州省教育厅自然科学基金(2003315)
贵州省教育厅大学生创业基金(701059101)资助。
关键词
磁光薄膜
椭偏光谱
磁控溅射
AG
magneto-optical films
spectroscopic ellipsometry
magnetron sputtering
Ag
