PCVD过程中的等离子体诊断

Plasma diagnostic techniques in PCVD

本文综述了ＰＣＶＤ过程中等离子体各种粒子和基团的诊断技术和方法。结合我们的研究工作，着重分析诊断技术在发展过程中所碰到的难题及其解决办法和仍待解决的问题。

In this paper ,we summarize the diagnostic techniques and methods of various charged particles and radicals and electrically neutral ones of plasma in the course of PCVD ,with emphasis on analysis of the difficulties and the ways to solve them by vari- ous diagnostic techniques based on our researches. Also , some existing problems that await solution are listed.