高温环境扫描电镜(KYKY1500)Ⅰ.成像原理及仪器特点

A New Environmental SEM with a Hot Stage(KYKY1500) Ⅰ Image Formation and Instrumental Characteristics

本文简要地叙述了ＫＹＫＹ１５００高温环境扫描电镜的一些基本概念：气体的电离效应，背底噪音，偏电压对信号电流的影响及图像形成的原理：并简单地介绍了本电镜的三个主要特殊系统（三级真空系统，环境信号探测系统及高温样品台）的结构与特点，此外，又给出了高温样品台中加热炉丝磁场对电子轨迹影响的计算结果。

The fundamental aspects of environmetnal scanning electron microscope (ESEM)—KYKY1500, ionization effect, background noise, contrast and the image formation at high gas pressures, are discussed. Parts of this ESEM, the vaccum system, the gaseous detector and the hot stage are described. The effect of stray magnetic field on the electron probe produced by the AC component in the heater current has been calculated and experimentally measured.