p型透明导电氧化物CuAlO_2薄膜的研究进展

Research Progress in p-type Transparent Conductive Oxide CuAlO_2 Thin Film

透明导电氧化物(TCO)的出现开拓了光电子器件研究的新领域。但p型TCO的相对匮乏严重制约了透明氧化物半导体(TOS)相关器件的开发与应用。CuAlO2作为一种天然的p型TCO成为近年来p型TCO的研究热点。介绍了p型TCO的研究现状,综述了不同制备方法制备p型CuAlO2薄膜的研究进展,以及在器件方面的应用,并对其前景进行了展望。

New fields in photoelectron apparatus are exploited when transparent conducting oxides（TCO） appeared. But the comparatively lack of the p-type TCO makes a heavy block in the way of the exploitation and application of TOS appliances. As a kind of natural p-type TCO, CuAlO2 has been a hotspot in p-type TCO researching fields. In this report, the researching state of p-type TCO is introduced, then some different preparation methods of p-type TCO and some applications in appliances are summarized. And the foreground is also prospected.