摘要
用微机械加工技术开发出一种微型方杯压阻式压力传感器。文中介绍了微型压力传感器的设计思想和研制工艺中的关键技术，并给出了该传感器的参数。测试结果表明该传感器的主要性能已达到国内先进水平。
The design ideas of a micro-type pressure transducer and the key technique in research and development are introduced in this paper- A silicon piezoresistive micro-type pressure transducer with a square cup has been developed by micrornachining. The parameters of the transducer are a1so given. Experimantal results show that the main performance of the transducer has reached the advanced level in our country.
关键词
压力传感器
微机械加工
压阻系数
pressure transducer, micromachining, piezoresistive effect
