用矢量网络分析仪及探针台测试半导体芯片参数

Measurements of On-wafer Chips Using Network Analyzer and Wafer Station

随着半导体器件的不断发展,微波测试技术占据越来越重要的地位,我所引进的矢量网络分析仪及探针台对半导体芯片S参数测试心免了键合引线,管壳和夹具带来的误差,正确反映了芯片的性能,是一种重要测试手段,本文论述了测试原理和测试方法,并对实测数据比对与误差分析.

Microwave measurement is vevy important for the development of microwave semi-conductor devices, especially mm--wave devias. Our institute introduced HP8510 Ne twork An-alyzer and waferstation, 'On Wafer' terting allows immediate measurement of a ctual devices be-fore dicing. It avoids bond wires, package and fixture effects. It proves to be an important measure-ment method. This peper describes its theory and operation, compares measuremetn data and ana-lyzes its uncertainty.