摘要
本文介绍了以可编程控制器SYSMAC-C200H为核心的真空控制系统,描述了控制系统的要求、组成及系统软件、硬件的设计思想和故障指示.
The vaccum control system whose core is SYSMAC- C200H programmable con controller isintroduced. Its requirements, composition , hardware and software design ideas and error in -dications for the controller are described.
出处
《电子器件》
CAS
1997年第1期482-487,共6页
Chinese Journal of Electron Devices
关键词
可编程控制器
强流离子注入机
真空系统
Programmable Controller, High Current Ion Implanter, Vaccum System
