溶胶-凝胶法制备ITO薄膜研究进展

Progress in preparation of ITO thin films by Sol-Gel process

概述了近年来国内外溶胶-凝胶法(Sol-Gel)制备ITO薄膜的研究状况,对Sol-Gel法制备ITO薄膜工艺做了简要介绍,重点讨论了Sol-Gel法制备ITO薄膜的溶胶体系,分析比较了有机醇盐、无机盐以及掺入ITO粉末方法体系的优缺点,最后讨论了甩膜法、提拉法及平铺法在Sol-Gel法制备ITO薄膜中镀膜的应用.指出Sol-Gel法是一种高效可行的制备ITO薄膜的方法,有着广阔的应用前景.

Recent progress in preparation of ITO thin films by Sol - Gel process was reviewed. The technological process in preparation of ITO thin films by Sol - Gel process was discussed briefly. Especially, the systems of sol in preparation of ITO thin films by Sol - Gel process, and the relative merits of the systems of sol about organic alkoxide, inorganic salt and the sol including ITO powder were discussed. At last, spin coating process, dip coating process and layering process were discussed. It was believed that the Sol - Gel process was a more efficient and viable way in preparation of ITO thin films, which had wide potential application.