PZT陶瓷靶材的制备及相成分分析

Preparation and Phase Analysis of PZT Ceramic Targets

采用固相反应法制备了一系列PZT陶瓷靶材,并用XRD对其进行了相成分分析.结果表明,PbO的富足可以大大抑制PbZrO3的分解,还可以抑制焦绿石相的产生,起到稳定钙钛矿相的作用.然而,过量的PbO会使材料局部区域的相成分发生波动,故而破坏相成分的一致性.此外,对单块的PZT样品进行烧结还会出现陶瓷分层现象,将多块样品放在一起烧结或采用先进的烧结工艺有利于抑制分层.

A series of PZT ceramic targets are prepared by traditional solid-phase reactive sintering,and their phase composition is examined by X-ray diffraction. It is shown that the existence of excess PbO could greatly inhibit the decomposition of PbZrO3 as well as the formation of pyrochlore, thus stabilizing the perovskite phase. However, excess PbO would make the ceramic composition change locally, thereby degrading the uniformity of the ceramic targets. In addition, one sole ceramic target fabricated by traditional solid-phase sintering tends to be stratified,which could be improved by sintering several samples or adopting advanced sintering technology.