摘要
根据传输线中高频电磁波的传播理论及网络理论分析了射频（ＲＦ）激励ＣＯ２激光器中的阻抗匹配问题，获得了等效阻抗匹配网络的设计方法及计算有关参数的普遍表达式。
The basic issues of impedance matching in a radio frequency discharge excited CO 2 laser are theoretically discussed in detail. A general and very applicable formula for selecting the parameters of the equivalent matching network is obtained. The results are also used to calculate the matching network parameters for other high frequency discharge excited CO 2 lasers.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1997年第3期202-208,共7页
Chinese Journal of Lasers
关键词
阻抗匹配
RF激励
激光器
二氧化碳
radio frequency discharge excited CO 2 laser, impedance matching
