金刚石薄膜在硬质合金表面的沉积与结合强度

Deposition and Adhesive Force of Diamond Films on Hard Alloy

研究了准分子激光辐照ＷＣ－６ｗ＋％Ｃｏ（ＹＧ６）硬质合金工具衬底产生的选择性蒸发和表面改性作用（粗糙化），ＹＧ６表面的钴含量被有效地降低。研究了在硬质合金ＹＧ６工具衬底沉积金刚石薄膜的良好工艺参数范围，由于钴的存在和迁移，沉积金刚石薄膜的温度和甲烷浓度范围变窄。对金刚石薄膜与硬质合金衬底的结合力进行了初步测试和讨论。

Selective evaporation and surface modification on hard alloy surface by excimer laser and its effection on growth of diamond have been studied.Results show that cobalt can be depleted effectively from the hard alloy surface when the energy density is around 1 J/cm 2。The temperature and CH 4 concentration ranges become narrow since cobalt migration.The adhesive force of the diamond films is measured by scrap method.