自注入式可变短脉冲准分子激光器的理论分析

Theoretical Study on a Self Injected Excimer Laser with Continuous Tunable Output Short Pulses

给出自注入式可变短脉冲准分子激光器运转和设计的理论基础。研究了其运行特征，设计和分析了一般商用器件实现运转要求具有的基本参数条件和实现可能。分析结果与国外最新实验结果具有较好的一致性，可用于指导器件的设计和实验。

We presents a theoretical analysis on a self injected excimer laser (SIEL) with 1￣10 ns continuous width tunable pulses output from a typical commercial excimer laser. The operational characteristics and the basic requirements were given. The results agree with the recent published experimental results of SIEL.