用于动态测量的双通道光学相位测量轮廓术

Two Channel Phase Measuring Profilometry Used in Dynamic Measurement

提出了利用编码光两个采样值实现相位测量轮廓术的原理。设计了一种偏振分光双通道测量系统，实现了两个采样值的同时记录，因而实现了动态测量，拓展了相位测量轮廓术的应用范围。

A new method of phase measuring profilometry, which uses only two samples of the coded intensity, is presented. By using polarization property, a two channel measuring system is designed, by which the two samples can be recorded simultaneously. Based on this system, the phase measuring profilometry can be used in the measurement of dynamic profile. This method broadens the application range of the measuring profilometry. The experimental results verify the reliability of the proposed methods.