摘要
探讨了光学元件表面微观轮廓统计特征参数的基本性质、计算方法及其相互关系;测试了大量各类光学系统、不同材料元件表面微观轮廓特征参数,由此明确了常用光学元件表面微观轮廓特征和轮廓参数的量值范围及其特征。
We studied the characteristics of surface profiles of the convential optical ements and the features of the characteristic parameters of the surface microprofile and mutual relations between them,and tested the characteristic parameters of the surface profile of a great number of otpical ements so as to determine the features and ranges of the surface microprofile.
出处
《光学精密工程》
EI
CAS
CSCD
1997年第2期77-83,共7页
Optics and Precision Engineering
基金
应用光学国家重点实验室基金
关键词
表面粗糙度
表面微观轮廓
特征参数
光学元件
Surface roughness.Image quality evaluation,Surface profile characteristic parameter