摘要
探讨了一种精密的Ｘ－Ｙ扫描工作台，论证其主要技术指标，介绍其结构特点，同时也进行理论分析，最后讨论其应用。
This paper researches on a precision X Y scanning stage,deals with its main technical specifications,introduces its design features,and also makes theoretical analysis,and finally discusses its utilization.
出处
《光学精密工程》
EI
CAS
CSCD
1997年第2期89-92,共4页
Optics and Precision Engineering
关键词
X-Y扫描台
图像处理系统
光学仪器
X Y scanning stage
Scanning mechanism
Posisioning accuracy
