摘要
介绍了故障树分析法的原理。以反应离子刻蚀(RIE)设备的典型故障为例,建立故障树,通过求解最小实际故障来进行定性分析。尝试扩展故障树在故障判断和改进真空系统可靠性方面的应用,得出几个有针对性的结论。该方法能提高故障诊断的效率和准确性。
The principle of FTA （fault tree analysis） was introduced. The typical RIE fault was illustrated to build up the fault tree and qualitatively analyze RIE fault by resolving the minimum practical fault. It was tried to apply FTA to the troubleshooting, reliability and other aspects of vacuum system. The method can raise the efficiency and precise rate of troubleshooting.
出处
《半导体技术》
CAS
CSCD
北大核心
2007年第3期205-207,共3页
Semiconductor Technology
关键词
反应离子刻蚀
故障树
最小
割集
RIE
fault tree
minimum partition aggregation
