中频DBD等离子体聚合马来酸酐薄膜的研究

Growth of Plasma Polymerized Maleic Anhydride Films by Pulsed Dielectric Barrier Discharge

用马来酸酐乙醇溶液为单体,采用脉冲介质阻挡放电(DBD)合成聚马来酸酐薄膜,研究了放电的不同频率,聚合的区域对聚合薄膜性能的影响。通过对薄膜性能的表征:接触角、红外光谱、表面形貌、薄膜厚度,发现在频率为80 kHz,气压50 Pa能聚合表面连续致密的聚马来酸酐薄膜,薄膜的生长速率为8 nm/min。

Maleic anhydride was polymerized and coated on glass and silicon substrates by pulsed dielectric barrier discharge（DBD） with maleic anhydride ethanol solution as the precursor.The film were characterized with Fourier transform infrared spoctroscopy（FTIR）, atomic force microscopy（AFM）, water contact angle measurement（WCA） and thickness profilometer. The influence of various factors, including frequency and power of the pulses, pressure, substrate temperature, and deposition rate, etc., on quality of the film was studied. The continuous, compact polymer films were grown at a frequency of80 kHz,in a pressure of 50 Pa and with a deposition rate of 8 nm/min and there is still room for improvement.