微辐射热计红外探测器的性能预测

Performance Prediction of Microbolometer IR Detector

叙述用微细加工技术制作的非致冷单片式半导体薄膜电阻辐射热计红外探测器的结构模型。基于模型所预测的性能与实验结果相符合。性能分析表明。

Structure models for uncooled monolithic semiconductor thin film resistance bolometer IR detector fabricated with micromachining processing were presented Predictions based on these models were compared with experimental measurements Performance analysis shows that high thermal isolation design and low noise are the key to the high performance of the detectors