大功率XeCl准分子激光器放电开关的实验研究

Experimental Study on a Discharging-Switch System of a High-Power XeCl Excimer Laser

本文报道了一台输出功率大于100W、重复频率达300Hz的XeCl准分子激光器的放电开关系统进行实验结果，比较了激励电路放电开关系统中带磁开关和无磁开关两种情况下闸流管的动态放电参数，证明了带磁开关的开关系统有利于激光器高重复频率工作和大功率输出。

Experimental study on a discharging-switch system of an XeCl excimer laser operating at repetition rate up to 300 Hi and with average output power over 100 W is made.The comparison between dynamic discharging parameters of thyratrons with and without a magnetic switch is conducted. We have found the swicth system with a magnetic switch is more advantegeous for high-power excimer laser operating at high repetition rates.