激光化学汽相沉积微透镜的分析

Analysis of Microlenses Fabricated by Laser Chemical Vapor

本文介绍了用激光化学汽相沉积(LCVD)球面微透镜的技术。首先对用LCVD法获得球面微透镜进行了理论分析,并用微计算机分析了在实验条件下,TEM_(00)模CO_2激光照射石英玻璃衬底在其表面产生的温度场,分析了在一定沉积条件下的微透镜厚度剖面形状,同时还用微计算机分析了平行光入射微透镜时的光学聚焦特性。分析与实践结果表明,只要适当地控制和调节沉积工艺,便可获得良好光学特性的氮化硅球面微透镜。

In this paper a technique of fabricating microlenses with spherical surface by laser chemical vapor deposition (LCVD) was introduced. First, the theoretical analysis of spherical microlenses deposited by LCVD was done. Under experiment condition the surface temperature fild of quartz glass substrate irradiated with TEMo0 mode CO_2 laser was analyzed with computer. At certain condition of deposition the thickness profile and optical focusing characteristic of the microlenses simulated with computer. The results of analysis and practice indicated that as long as the deposition technology was controled and adjusted properly the spherical silicon-nitridmicrolenses with fine optical characteristic could be abtained.