提拉法耕备耐刮擦SiO2减反膜

Scratch-resistant SiO2 Antireflective Coatings Prepared by Dip Coating Method

以正硅酸N（TEOS）原料，采用碱／酸两步催化法制备出SiO2溶胶，在未钢化的玻璃表面经提拉法制备SiO2薄膜，利用玻璃的钢化过程对薄膜进行热处理。使用场发射扫描电子显微镜、原子力显微镜、椭偏仪、傅立叶红外光谱、分光光度计等分析了薄膜的特性。实验结果表明经过玻璃的钢化后，薄膜反射率峰值为0．17％，在400-800nm的波长范围内平均反射率较镀膜前下降了5％以上，同时薄膜具有较好的耐刮擦性能。

The scratch-resistant SiO2 antireflective coatings were prepared by dipping of the glass followed by a thermal curing at 700 ℃ taking place simultaneously with the glass toughening, using the base/acid two-step catalytic sol-gel process with tetraethylorthosilicate （TEOS） as precursor. The coatings were characterized＇with Scanning Electron Microscope （SEM）, Atomic Force Microscopy （AFM）, Fourier-transform infrared spectroscopy （FTIR）, UV-VIS-NIR spectrophotometer and ellipsometery, respectively. The experimental results show that glass toughening remarkably strengthens the mechanical properties of the coatings. While the coatings still have good optical properties. The average reflectance between 400 nm and 800 nm is reduced for more than 5% compared with that of the uncoated glass, and the peak reflectance is below 0.2%.