摘要
飞秒激光微加工技术具有加工精度高、热效应小、损伤阈值低以及能够实现真正的三维微结构加工等优点,这些特性是传统的激光加工技术所无法取代的。首先回顾了激光微加工和超短脉冲激光技术的发展历史,然后介绍超短脉冲激光与金属和介质材料相互作用的机制,接着阐述了飞秒激光直写、干涉和投影制备等各种加工方法的原理,重点讨论飞秒激光在三维光子器件集成、微流体芯片制备及其在生化传感方面的应用等,最后展望了飞秒激光微加工领域所面临的机遇和挑战,指出了未来的研究方向。
Femtoseond laser micromachining enables fabrication of true three-dimensional (3D) microstructures with high precision and low heat effect and damage threshold, showing unique advantages over the traditional laser micromachining technology. We first review the histories of laser microprocessing and ultra-short pulse laser technology, and then outline the mechanisms of the interactions of ultra-short laser pulse with metals and transparent media. Next, we introduce several major technical approaches in the field of femtosecond laser micromachining such as femtosecond laser direct writing, multi-beam interference and projection patterning, as well as their applications in fabrication of 3D integrated optical devices, microfluidic chips, and chemical and biological sensors, etc. Lastly, we highlight the opportunities and challenges in the field, and suggest some directions for the future research.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2007年第5期595-622,共28页
Chinese Journal of Lasers
关键词
超快光学
飞秒激光
光与物质相互作用
微加工
集成光学
双光子聚合
微流体
纳米颗粒
ultrafast optics
femtosecond laser
light-matter interaction
micromachining
integrated optics, two photon polymerization
microfluidics
nanoparticles