非离子型产酸剂——N-羟基邻苯二甲酰亚胺对甲苯磺酸酯的合成与性能研究

Synthesis and Characterization of the Non-Ionic Photoacid Generator-Phthalimidotosylate

以邻苯二甲酸酐、盐酸羟胺和对甲苯磺酰氯为起始原料,合成了非离子型光致产酸剂——N-羟基邻苯二甲酰亚胺对甲苯磺酸酯,对其进行了红外、核磁共振和紫外表征,测定了其化学结构、溶解性和紫外吸收等性能.结果表明,这种非离子型产酸剂较离子型产酸剂在常用溶剂中有非常良好的溶解性,并在248 nm处有好的透明性,可用于深紫外光刻工艺体系.

Phthalimidotosylate （PIT） was synthesized from o-phthalic anhydride, hydroxylamine hydrochloride and p-toluenesulfonyl chloride. It was characterized with FTIR and 1H NMR. Experiments showed that PIT has good transparence in 248 nm wavelength （ absorbance = 0. 375 ） and good solubility in organic solvents. So it is a good potential photoacid generator （PAG） in the deep- UV 248 nm photoresist system.