电磁谐振式微泵电感线圈组件的研究

Research on Inductor of Electromagnetic Resonant Micro-Pump

提出了一种电磁谐振式微泵电感线圈组件的新制造方法,该方法在硅杯表面采用浓硼扩散区与镀金膜形成的欧姆接触电极作为内引线.我们设计了硅基电感的结构和相关的工艺流程,再利用Ansys有限元软件中的电磁分析模块模拟了电流与磁感应强度的关系、衬底涡流分布等,为平面电感的理论与实验的进一步比较分析提供了参考依据.我们在硅杯背面采用激光打孔得到了膜厚约为5μm的硅膜,从而可以使衬底中的涡流大幅度减少、电感的Q值得到很大提高.本文提出的新制造方法采用了绝缘性能比SiO2好的Al2O3薄膜作为电感线圈与衬底之间的绝缘层.实验结果表明,本文设计的平面螺旋电感具有制造工艺简单、与IC工艺相兼容的优点,有广泛的应用前景.

This paper puts forward a new method of inductor fabrication of electromagnetic resonant Micro-Pump, whose internal down-lead adopts ohmic contact formed by the boron heavily doped region and the Au evaporated. It designs the related fabrication process and the structure for inductor on the silicon, and then, the relations of current versus magnetic flux density by Ansys and the distribution of eddy, and so on. All of these simulations provide reference for further comparison and analysis for theory and experiment of planar spiral inductor. So, we fabricate the inductor on the silicon cup, then dig holes on the back of silicon cup by laser to further reduce substrate thickness. As a result, the silicon membrane thickness is 5 tan, which can greatly reduce eddy effect and increase quality factor. Moreover, we adopt Al2O3 as the dielectric film between the coils and substrate, whose dielectric performance is better than SiO2. Conclusion shows that our planar spiral inductor has the advantages of simple technology and compatibility with IC technology, and that it has extensive future.