碳污染对钛膜吸氢能力影响的研究

Effect of C Contamination on H_2 Uptake of Ti Film

在钼基底上蒸镀钛膜，用乙炔（C2H2）在钛膜表面引入碳污染，用X射线光电子谱和俄歇电子谱研究钛膜表面的碳的化学状态，以及表面的碳污染对钛膜吸氢能力的影响。实验发现，碳在钛表面以两种到三种化学状态存在。碳在钛表面将使钛膜的吸氢能力下降，而且不同化学状态的碳对钛膜吸氢能力的影响也不同。实验结果表明，呈TiC状态的碳是降低钛膜吸氢能力的主要因素，其原因是它使解离吸附位置减少。

Contamination effects of carbon on hydrogen uptake of Ti film deposited on Mo substrate was investigated by the metheds of surface analysis. On the Ti surface,carbon contamination was intentionally introduced,and three chemical states of carbon were detected, whose presence reduced the hydrogen uptake.The results indicate that TiC is the main factor of reducing the ability of hydrogen absorption due to the decrease of dissociative sites.