摘要
在钢渗铬层表面用化学气相沉积(CVD)法制备了金刚石薄膜。使用扫描电镜(SEM)、透射电镜(TEM)和压痕法研究了金刚石膜的表面、界面结构及附着力。用拉曼光谱分析了金刚石膜的纯度及非金刚石碳相。甲烷含量超过0.6%(体积分数)后,金刚石膜为球形纳米晶,形核密度>107cm-2。用甲烷含量为0.6%(体积分数)沉积的金刚石膜表面的残余压应力为1.22 GPa,而膜背面的残余压应力更高,达2.61 GPa。压痕显示在19.6 N载荷下膜发生开裂。TEM观察发现,膜/基界面为微观非平面,有利于提高金刚石膜的附着力。
CVD diamond films were deposited on the chromized layer of a steel. The surface, the structure of interface and the adhesion of the films were investigated using scanning electron microscopy, transmission electron microscopy （TEM） and indention tests. The diamond purity and interfacial phases were evaluated with Raman Spectroscopy. When the CH, ： H2 ratio is higher than 0. 6%, diamond film is composed of spherical nanograins, and the nucleus density is larger than 107cm^-2. The residual compressive stress on the surface of diamond film synthesized at 0. 6% CH4 is 1.22 GPa, lower than that of the film back, 2.61 GPa. The film cracks at 19.6 N load in indention tests. TEM observation indicates the film/substrate interface is micro-rough and thus beneficial to adhesion.
出处
《理化检验（物理分册）》
CAS
2007年第5期217-220,共4页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
基金
广东省自然科学基金项目(013004
04300026)
关键词
化学气相沉积
金刚石膜
渗铬钢
界面
附着力
Chemical vapor deposition （CVD）
Diamond film
Chromized steel
Interface
Adhesion
