摘要
对探针的制作方法、关键工艺环节等进行了分析与研究,给出了基于UV-LIGA技术制备微型柔性镍接触探针的工艺过程,分析了制备的技术关键,试验优选了关键制备环节的工艺参数,在此基础上,制作出微型柔性镍接触探针。试验结果表明:采用工艺条件优选的UV-LIGA技术,如前烘60℃,120 min,90℃,120 min;较大曝光剂量;后烘65℃,10min,95℃,45 min;匀胶后静置、随炉冷却和超声辅助显影等辅助措施,所制备出的柔性接触探针(主体总长4 mm,宽80μm,高100μm;弹簧处高宽比为5(100μm:20μm))尺寸精度高;三角锥状针尖曲率半径小于5μm;缺陷少,形貌质量高。
Fabrication method and its key process points of the micro probes used in ICs or semiconductors were analyzed. The processes of nickel soft contact microprobes produced by UV-LIGA were introduced. By analyzing on its fabricating keys and optimizing the experimental process parameters of some key fabrication steps,a kind of nickel soft contact microprobe was fabricated. The experimental results show that nickel soft contact microprobe has total length of 4 mm, width of 80 μm, and height of 100 μm. Radius of curvature of the tip is less than 5 μm and the high-to wide ratio（100 μm ： 20 μm） of spring is 5. The micro probes with appropriate dimensional accuracy, good appearance quality and less drawbacks can be fabricated relatively economically based on the optimized process conditions （before-exposure bake： 60 ℃, 120 min, 90 ℃, 120 minl exposure： high level of exposure energy; post-exposure bake. 65 ℃, 10 min, 95 ℃, 45 min ; accessorial measurements, ultrasonic stirring developing, placing in air, cooling resist with stove closed） of UV- LIGA.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第5期735-740,共6页
Optics and Precision Engineering
基金
江苏省自然科学基金资助项目(No.2004214)
