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Development of Miniature Spectrometers

Development of Miniature Spectrometers
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摘要 Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development. Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development.
作者 ZHANG Zhi-guo
机构地区 The Educational Administration of Beihua University
出处 《Semiconductor Photonics and Technology》 CAS 2007年第2期132-135,共4页 半导体光子学与技术（英文版）
关键词 微型光谱仪 微光电机械系统 Fourier变换干涉计 研制 micro-spectrometer micro-opto-electro-mechanical system （MOEMS） Fourier transform interferometer（FTS） spectroscopy
分类号 TH744 [机械工程—光学工程]
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Semiconductor Photonics and Technology
2007年 第2期

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