摘要
本文综述了Ｓｉ１－ｘ－ｙＧｅｘＣｙ合金的研究进展，包括合金的应变补偿效应、微观结构。
The study on Strained Si 1-x-y Ge xC y Layers is reviewed in the paper. The characteristics of this layers,including the strain compensation effect,the micro-structure,the energy band structure, electrical and optical properties are presented.
关键词
合金
应变补偿
能带结构
碳化硅
半导体材料
Si 1-x-y Ge xC y alloys,strain compensation effect,energy band structure
