Mo-Al_2O_3金属陶瓷颗粒膜的光学常数研究

Optical Constants of Mo-Al_2O_3 Cermet Granular Films

采用磁控溅射技术在不锈钢片上沉积了Mo-Al2O3金属陶瓷混合膜,将Maxwell-Garnett等效媒质理论应用于Mo-Al2O3颗粒膜的光学常数分析,分别以Mo和Al2O3的块体材料和溅射薄膜的光学常数为基础,理论计算了不同金属填充因子金属陶瓷颗粒膜在300nm～800nm波段范围内的光学常数n,k随波长λ的变化规律,同时对理论计算结果与实验测试结果之间存在的差异及其产生的原因进行了讨论。

The Mo-Al2O3 cermet granula films were deposited on stainless steel substrates by magnetron sputtering. The Maxwell-Garnett equivalent medium theory was used to analysis the optical constants of Mo-Al2O3 granular films. The optical constants, such as n and k, and their variations with wavelengths of from 300 nm to 800 nm were studied for the Mo-Al2O3 granular films based on the optical constants of bulk material and thin films of Mo and Al2O3. The possible reasons for the disagreement between theory and experiment were explained at the same time.