基片斜切角度对YBCO薄膜微观结构及超导电性能的影响

Effects of Substrate Miscut Angle on Microstructure and Superconductivity of YBCO Films

研究基片斜切角度对YBCO薄膜微观结构及超导电性能的影响。采用脉冲激光沉积（PLD）法在0°～6°斜切（001）SrTiO3基片上制备了具有c取向的YBCO薄膜。用XRD和TEM对薄膜微观结构进行了分析，用标准四引线法测定薄膜电阻．温度关系，从而确定薄膜的超导电性能。结果表明，随斜切角度的增大，薄膜晶体质量下降，晶格弯曲畸变程度增大，超导临界转变温度降低，转变宽度增大。

c-axis-oriented YBCO thin films were prepared on the SrTiO3 （001） substrates of 0°-6°-miscut by pulsed laser deposition. The microstructures of these films were examined by X-ray diffraction and transmission electron microscopy. The resistance-temperature curves of films were measured in order to determine their superconductivity. The results show that as the miscut angles of substrates increase, the crystal quality of film decreases, and the distorted degree of lattice increases with lower superconducting transition temperatures and wider transition widths.