新一代nm级集成工艺仿真工具——SenTaurus Process

The New Generation Nano-Level Integrated Process Simulation Tool:SenTaurus Process

介绍了新思科技(Synopsys Inc.)最新推出的新一代nm级IC制程工艺设计工具——Sen-Taurus Process的基本功能及其仿真领域,详细阐述了SenTaurus Process功能的拓展。对SenTau-rus Process增加的模型库浏览器(PDB)、一维模拟结果输出(Inspect)及二、三维模拟结果输出(Tecplot SV)工具进行了介绍。重点介绍了SenTaurus Process所嵌入的诸多小尺寸模型。

This paper introduces the elementary functions and emulational domains of the new generation nano-level IC process design tool： SenTaurus Process, which was recently issued by Synopsys Inc.. It specifies the functional extensions of SenTaurus Process and presents Parameter Database Browser （PDB）, 1D simulated results deferent tools （Inspect） and 2D/3D simulated resuits deferent tools （Tecplot SV） . It emphasizes a lot of small size models inserted in SenTaurus Process.