CVD金刚石薄膜涂层轴承支撑器的制备和应用

Fabrication and Application of Diamond Film-coated Bearing Support Implement

轴承支撑器是轴承精密加工中的关键部件。本文采用热丝化学气相沉积(简称CVD)法,以丙酮和氢气为碳源,在WC-Co硬质合金轴承支撑器衬底上沉积金刚石薄膜,制备CVD金刚石薄膜涂层轴承支撑器,并应用于轴承的精密磨削加工。结果表明,合理控制衬底材料的预处理和CVD沉积工艺对金刚石薄膜质量、形貌、粗糙度和薄膜与衬底间的附着力有显著影响。与传统硬质合金轴承支撑器相比,CVD金刚石涂层轴承支撑器的耐用度和使用性能显著提高。

A bearing support implement is of critical importance in the precision processing of bearings. Following the hot filament chemical vapor deposition （CVD） technique, the diamond film was deposited on the substrate of the WC-Co-cemented carbide bearing support implement using acetone and hydrogen as its reaction gas. The diamond film-coated bearing support implement thus fabricated is applied to the precision grinding of bearings. The results show that the pretreatment of materials of the substrate and the CVD technique should be controlled appropriately because they exert remarkable influence on the morphology, quality surface roughness and adhesive force of the diamond film. Compared with the cemented carbide bearing support implement, the diamond-coated bearing support implement using CVD technique has much better durability and performance.