摘要
阐述了真空电弧等离子体特性诊断的重要意义,列举了常用的诊断方法及其工作原理,综述了近年来国内外关于真空电弧等离子体特性诊断方面的实验研究进展。
The significance of the diagnosis based on the arc plasma characteristics in vacuum is discussed with some common diagnoses and their operating principles exemplified. Reviews the progress in the experimental studies on the diagnoses by arc plasma characteristics in vacuum domestically and globally in recent years.
出处
《真空》
CAS
北大核心
2007年第3期69-71,共3页
Vacuum
基金
国家自然科学基金资助项目(50507001
50537010)
关键词
真空电弧
电弧等离子体特性
诊断
电子温度
电子密度
vacuum
arc plasma characteristics
diagnosis
electron temperature
electron density
