摘要
随着汽车传感器的迅速发展和对MEMS(微机电系统)技术研究的深入,基于MEMS技术的汽车传感器具有广阔的应用前景。本文就MEMS汽车传感器的研究应用现状、MEMS汽车传感器的分类、制作加工技术和工艺等进行了简述,并详细介绍了几种典型的MEMS汽车传感器,最后对MEMS汽车传感器今后的发展进行了探讨。
Along with rapid development of the automotive sensors and the farther research of MEMS technology, the automotive sensors based on MEMS have extensive applied foreground. In this paper, the present application and the classification of the MEMS automotive sensors are introduced. Several manufacturing methods are narrated in more detail. And a few typical models of the MEMS automotive sensors are given in detail. In the end the future trend of the MEMS automotive sensor is pointed out.
出处
《电工技术学报》
EI
CSCD
北大核心
2007年第4期77-84,共8页
Transactions of China Electrotechnical Society
基金
北京市教育委员会科技发展计划资助项目(KM200610011003)
关键词
汽车电子
汽车传感器
微传感器
MEMS技术
Automotive electronics, automotive sensors, micro-sensors, MEMS technology
