硅芯炉托盘控制系统的设计与实现

Design and Implementation of the Control System of the Silicon Core Growing Furnace's Seed Crystal Tray based on Aduc812 Single Chip Microcomputer

在介绍硅芯炉籽晶托盘构成及工作原理的基础上,重点介绍了以单片机Aduc812为控制核心的控制系统,并对控制系统硬件设计和软件设计进行了详细分析。

The constitution and operating principle of seed crystal tray of silicon core growing fumace are introduced, the control system of seed crystal tray based on AducS12 single chip microcomputer is presented specially.The hardware design and software program of the control system are discussed in detail.